YES-RCM3, Yield Engineering System

30 STEC MFC SEC-4400M, WF6, SiH4, SiF4,

 CTI 8116041G001 8 inch Cryo pump 200L/S with access

Pfeiffer Turbo pump TMU 521 P and Turbo Controller TC 7

 Praxair Ampoule Bubbler Applied Materials 0195-0263

CPI Power supply CPW2870B10, Novellus R27-159201-00, 46

EDWARDS EPX 180L Dry vaccum pump EPX180L

Lot of 10 Berkeley Process Controls MWT-8-MNET Machi

RFPP 7520581010, RFPP AE RF50S 5KW RF power products

AE APEX 1513, 1.5 K HALO A3L5L000BA140D111A, 0920-00067

ASTEX MKS remote plasma generator ASTRONhf-S, AX7645H-0

CTI On Board 8, 8116041G001, Cryopump, OEM Box

CTI On Board 8, 8116041G001, 8" Cryo

2 Recif IDLW8, OCR 200mm wafer system, Wafer ID Reader

PFEIFFER VACCUM TMH 071 P DN 63 ISO-K, 3P, TC750-E74, P

AMAT 0040-39619 Super E, Etch chamber lid REV P3

Polaron SC7680, Tabletop Sputter coater with carbon acc

AE Advanced Energy MDX Pinnacle 3152426-112, 12 KW powe

PFEIFFER Vacuum turbo pump TMU 521 PX, D-35614 Asslar,

 AMAT 0100-14010, Console I/O, Back Plane PCB

CTI on board water pump 8124400G002 8" F configuratio

 CTI On-Board Cryo pump m/n 8116080G001 w/bl seal

Novellus, 02-047735-01, Spindle driver shaft assembly

AMAT 0040-08137 etch chamber cathode, AMAT 0010-27963 u

CTI 8124400G002 Cryo pump assy, turbo plus 8, water pum

Advanced Energy 3152603-012, E'wave Power Supply, 3 cha

Advanced Energy 3152603-005, E'wave Power Supply, 3 cha

CTI on board 4 cryo pump 8116100G001

Pfeiffer TMH071 Turbo Pump,  in OEM box

IGC Polycold Cryotiger water pump 11102-05